95%• Better uniformity and repeatability• More smooth side wall">

大奖18娱乐(中国)官方网站

干法刻蚀设备

Over 30 years experience for ICP etch tools • Pressure Control (patented) • Solid State RF Tuning • ICP chamber temperature control (patented) Performance Advantages • Higher Uptime > 95% • Better uniformity and repeatability • More smooth side wall

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