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表面颗粒及缺陷检测设备

The Candela Instruments family of Optical Surface Analyzers was first developed for inspection of hard disk substr

The Candela Instruments family of Optical Surface Analyzers was first developed for inspection of hard disk
substrates, then extended to inspection of wafer substrates.
Examples of Substrate and Epi inspection /Substrates: Sapphire and SiC /Automatic Defect Classification /
Versatile Analysis Capabilities / Comparison to V isual Inspection.
The CS10 (manual) and CS20 (automated) are the newest products, can measure both opaque and transparent
wafers from 2 to 8 inches in diameter.
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