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低温去胶和去Polymer设备
低温去胶和去Polymer设备
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干法去胶及去残胶设备
Great Momentum for Tool Acceptance
Targeted shipments in China and East Coast
Several successful demos for multiple
Wide Range of Applications
PR strip, CuO reduction, Bond pad
clean anneal, etc
Lower CoO and Higher
Fully-imidized and cross-linked curing
High strip rate at lower temp with no
defects damage due to unique HW
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多片旋转喷淋去胶设备
多片旋转喷淋去胶设备
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真空去泡烘烤机
1、Rapid deoxidation
2、 high efficiency
3、 heat preservation and energy saving
4、Good sealing
5、 shelves
6、Beautiful and simple
7、Wide choice of temperature range
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全自动散热片机
CCD 散熱片偏移視覺檢測能力
產品可作壓力預壓每個壓頭獨立壓力全時監控
單一植片頭壓力 800~4500g + -10%
Laser sensor 偵測基板高度,偵測精度 + - 10um
SECS GEM system 與 2D bar code 作業功能
產品作業範圍 7x7~110x110mm 產品
散熱片植片精度+ -80um
植片壓頭 X-Y-R 軸自動視覺修正
機構重複精度+ -20um以內
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精密划片机
精密划片机配置2 4kw大功率直流主轴;高刚性门式结构;0轴DD马达驱动;进口高精度丝杠、导轨;双镜头对准;软件功能进一步强化，自动化程度显著提升;可广泛满足于各种加工需求。
